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Caroline Soyer, Eric Cattan, Denis Remiens

Public reference bibliography and cataloged PDF materials authored or published by Caroline Soyer, Eric Cattan, Denis Remiens.

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Electrical damage induced by reactive ion-beam etching of lead-zirconate-titanate thin films

Year: 2005 • Source: hal.science • Listed PDF

Ion-beam etching of sputtered Pb(Zrx,Ti1-x)O3 (PZT) thin films with x equal to 0.54 grown on Pt/TiOx/SiO2/Si substrates has been performed using pure Ar gas and a varying CHF3/Ar gas mixing ratio. The etch rate dependenc...