Home » Authors » Sumit K. Soni, Diane Samélor, Brian W. Sheldon, Constantin Vahlas, Alain Gleizes

Sumit K. Soni, Diane Samélor, Brian W. Sheldon, Constantin Vahlas, Alain Gleizes

Public reference bibliography and cataloged PDF materials authored or published by Sumit K. Soni, Diane Samélor, Brian W. Sheldon, Constantin Vahlas, Alain Gleizes.

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Residual Stress Mechanisms in Aluminum Oxide Films Grown by MOCVD

Year: 2009 • Source: hal.science • Listed PDF

Residual stresses in amorphous aluminium oxide films were investigated with in situ wafer curvature measurements. The films were deposited from aluminium tri-isopropoxide, on sapphire substrates. Large tensile stresses o...