Home » Authors » Toshiyuki Tabata, Pierre - Edouard Raynal, Fabien Rozé, Sébastien Halty, Louis Thuries, Fuccio Cristiano, Emmanuel Scheid, Fulvio Mazzamuto

Toshiyuki Tabata, Pierre - Edouard Raynal, Fabien Rozé, Sébastien Halty, Louis Thuries, Fuccio Cristiano, Emmanuel Scheid, Fulvio Mazzamuto

Public reference bibliography and cataloged PDF materials authored or published by Toshiyuki Tabata, Pierre - Edouard Raynal, Fabien Rozé, Sébastien Halty, Louis Thuries, Fuccio Cristiano, Emmanuel Scheid, Fulvio Mazzamuto.

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Copper Large-scale Grain Growth by UV Nanosecond Pulsed Laser Annealing

Year: 2021 • Source: hal.science • Listed PDF

UV nanosecond pulsed laser annealing (UV NLA) enables both surface-localized heating and short timescale high temperature processing, which can be advantageous to reduce metal line resistance by enlarging metal grains in...