Home » Authors » Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata

Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata

Public reference bibliography and cataloged PDF materials authored or published by Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata.

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Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS

Year: 2011 • Source: hal.science • Listed PDF

The article presents a new equivalent circuit model of electrostatic comb transducers for an integration of MEMS into LSI. The model detects the displacement using a dummy spring to express the current induced by the mov...