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Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS
Author / Organization: Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata
| File Format | PDF (Portable Document Format) |
|---|---|
| Publication Year | 2011 |
| Source Host |
HAL Open Science
(hal.science)
|
| License / Terms | Open Access / Creative Commons |
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