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Process of obtention of titanium nitride by rapid thermal annealing
Author / Organization: Victor Vallejo-Otero, Arnaud Valour, Stéphanie Reynaud, Christophe Donnet, Émilie Gamet, Nicolas Crespo-Monteiro, Yves Jourlin
| File Format | PDF (Portable Document Format) |
|---|---|
| Publication Year | 2023 |
| Source Host |
HAL Open Science
(hal.science)
|
| License / Terms | Open Access / Creative Commons |
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