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Enhancement of the superconducting critical temperature of NbN ultra-thin films in a CMOS-compatible silicon nitride photonic platform on 200-mm-diameter wafers

Author / Organization: Valentin Brisson, Edith Bellet-Amalric, Nicolas Bernier, Jonathan Faugier-Tovar, Matthew Bryan, Joel Bleuse, Jean-Michel Gerard, Segolene Olivier

File Format PDF (Portable Document Format)
Publication Year 2025
Source Host HAL Open Science (hal.science)
License / Terms Open Access / Creative Commons

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