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TEMPERATURE DEPENDENCE OF CL AND EBIC IMAGES OF DISLOCATED GaAs AND Si
T. Sekiguchi, Y. Miyamura, K. Sumino

TEMPERATURE DEPENDENCE OF CL AND EBIC IMAGES OF DISLOCATED GaAs AND Si

Author / Organization:
Science & Mathematics Published 1989 Verification Pending

Overview & Synopsis

The interactions of dislocations with impurities and/or point defects in GaAs and Si crystals with various thermal histories are investigated by observing the temperature dependence of -the CL and EBIC images. Since the impurity distribution around a dislocation changes drastically with temperature, the specimens with different thermal histories show various CL or EBIC contrasts reflecting the distribution of impurities and/or point defects.

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Document Information

Document Title TEMPERATURE DEPENDENCE OF CL AND EBIC IMAGES OF DISLOCATED GaAs AND Si
Author / Organization T. Sekiguchi, Y. Miyamura, K. Sumino
Subject & Discipline Multidisciplinary Academic Open Research
Categories Science & Mathematics
Publication Year 1989
License / Rights Open Access / Creative Commons
Resource Verification Listed PDF (Verification Pending)
Original Host Website HAL Open Science (hal.science)
File Format application/pdf (Portable Document Format)
Language EN
Catalog ID DOC-177886
Original Source Link Visit Source Page on hal.science »